4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Adam R. Pawloski

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Extreme ultraviolet (EUV) lithography masks

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Method and apparatus for elimination of bubbles in immersion...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Reexamination Certificate

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Method and apparatus for reducing biological contamination...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Method for removal of immersion lithography medium in...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Phase-shift reflective mask for lithography, and method of...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2422999

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