Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate
2004-03-01
2010-06-22
Duda, Kathleen (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
C134S001000
Reexamination Certificate
active
07741012
ABSTRACT:
A process for fabricating a semiconductor device, including applying an immersion lithography medium to a surface of a semiconductor wafer; exposing a material on the surface of the semiconductor wafer to electromagnetic radiation having a selected wavelength; and applying supercritical carbon dioxide to the semiconductor wafer to remove the immersion lithography medium from the surface of the semiconductor wafer. In one embodiment, the process includes recovery of the immersion lithography medium.
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Abdo Amr Y.
Amblard Gilles R.
LaFontaine Bruno M.
Lalovic Ivan
Levinson Harry J.
Advanced Micro Devices , Inc.
Duda Kathleen
Farjami & Farjami LLP
Sullivan Caleen O
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