Method and apparatus for reducing biological contamination...

Details Method and apparatus for reducing biological contamination... Method and apparatus for reducing biological contamination...

2008-01-01

2008-01-01

Berman, Jack (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C355S030000, C355S055000, C355S071000, C355S077000, C396S604000, C396S611000, C356S239200, C356S401000, C430S311000, C430S322000, C430S323000

Reexamination Certificate

active

07315033

ABSTRACT:
Disclosed are a method of reducing biological contamination in an immersion lithography system and an immersion lithography system configured to reduce biological contamination. A reflecting element and/or an irradiating element is used to direct radiation to kill biological contaminates present with respect to at least one of i) a volume adjacent a final element of the projection system or ii) an immersion medium supply device disposed adjacent the final element.

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Morris, Christopher G., editor. Academic Press Dictionary of Science and Technology [online]. San Diego: Academic Press, 1992 [retrieved on May 8, 2007]. Retrieved from the Internet: <URL:http://www.xreferplus.com/entry.jsp?xrefid=3150636&secid=.-&hh=1>“reflective coating”.

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