4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Insulative material deposited upon semiconductive substrate

Fabrice Geiger

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Integration scheme using self-planarized dielectric layer...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Low thermal budget solution for PMD application using sacvd...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Utilizing reflow
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Methods for forming self-planarized dielectric layer for...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Process for depositing a porous, low dielectric constant...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Thermal CVD process for depositing a low dielectric constant...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2620003

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