Radiant energy – Inspection of solids or liquids by charged particles
Patent
1987-07-07
1989-10-31
Fields, Carolyn E.
Radiant energy
Inspection of solids or liquids by charged particles
2504421, 310328, H01J 3726
Patent
active
048779571
ABSTRACT:
A scanning type tunnel microscope comprises a sample holding member for supporting a sample and a scanning probe which is arranged to face the sample to be separated therefrom by a very small distance and a supported by a scanning probe holding member. A tunnel current is flowed between the sample and scanning probe upon application of a voltage thereacross. A first actuator is coupled to the sample holding member and a second actuator is coupled to the scanning probe holding member so that the first and second actuators relatively drive said sample and said scanning probe in an axial direction and in a planar direction through said sample holding member and said scanning probe holding member. A differential micrometer is connected to the first actuator to move the actuator in the axial direction, and the micrometer and the second actuator are fixed on a substrate.
REFERENCES:
patent: 3611577 (1971-10-01), Smith
patent: 4343993 (1982-08-01), Binnig et al.
patent: 4422002 (1983-12-01), Binnig et al.
patent: 4583135 (1986-04-01), Kimura
patent: 4651046 (1987-03-01), Ohya et al.
P. E. Smith et al, "Ultrasmall Scanning Tunneling Microscope For Use in a Liquid-Helium Storage Dewar", Rev. Sci. Inst., 57(10), Oct. 1986, pp. 2630-2631.
Binnig et al, "The Scanning Tunneling Microscope", Scientific American, Aug. 85, pp. 50-56.
Blackford et al, "High-Stability bimorph scanning tunneling microscope", Rev. Sci. Instrum. 58(8), Aug. 1987.
Drake et al, "Tunneling Microscope for Operation in Air or Fluids", Rev. Sci. Instrum., 57(3), Mar. 1986.
Sonnenfeld et al, "Atomic-Resolution Microscopy in Water", Science, Apr. 1986.
Kouchi Toshihito
Mikoshiba Nobuo
Mishima Shuzo
Morita Seizo
Ogawa Haruo
Fields Carolyn E.
Miller John A.
Olympus Optical Co,. Ltd.
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