SONOS memory device having curved surface and method for...

Details SONOS memory device having curved surface and method for... SONOS memory device having curved surface and method for...

2009-06-10

2010-11-23

Toledo, Fernando L (Department: 2895)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S259000, C257S315000, C257S330000, C257SE21209, C257SE21422

Reexamination Certificate

active

07838365

ABSTRACT:
A new SONOS memory device is provided, in which a conventional planar surface of multi-dielectric layers (ONO layers) is instead formed with a curved surface such as a cylindrical shape, and included is a method for fabricating the same.A radius of curvature of the upper surface of a blocking oxide can be designed to be larger than that of the lower surface of a tunneling oxide, which restrains electrons from passing through the blocking oxide by back-tunneling on erasing. As a result, a SONOS memory device shows an improvement in erasing speed.

REFERENCES:
patent: 6548861 (2003-04-01), Palm et al.
patent: 6794249 (2004-09-01), Palm et al.
patent: 7250651 (2007-07-01), Kusters et al.
patent: 2006/0038220 (2006-02-01), Kusters et al.
patent: 2008/0157172 (2008-07-01), Lee
patent: 1020030020644 (2003-03-01), None
Reisinger et al., “A Novel SONOS Structure for Nonvolatile Memories with Improved Data Retention”, Symposium on VLSI Technology Digest of Technical Papers, 1997, pp. 113-114.
Lee et al., “A Novel Structure of SiO2 /SiN/High k Dielectrics, A12O3 for SONOS Type Flash Memory”, Int'l Conf. Solid State Dev. Materials, 2002, pp. 162-163.
Lee et al., “A Novel SONOS Structure of SiO2/SiN/A12O3 with TaN Metal Gate for Multi-giga Bit Flash Memories”, Int'l Electron Dev. Meeting, 2003, pp. 613-616.

Affiliated with

Also associated with

Rating

SONOS memory device having curved surface and method for... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with SONOS memory device having curved surface and method for..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and SONOS memory device having curved surface and method for... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4214329