Algorithm for real-time process control of electro-polishing

Details Algorithm for real-time process control of electro-polishing Algorithm for real-time process control of electro-polishing

2006-06-27

2009-12-08

Wilkins, III, Harry D. (Department: 1795)

Electrolysis: processes, compositions used therein, and methods

Electrolytic erosion of a workpiece for shape or surface...

With control responsive to sensed condition

C205S641000, C205S642000

Reexamination Certificate

active

07628905

ABSTRACT:
Method and apparatus for process control of electro-processes. The method includes electro-processing a wafer by the application of two or more biases and determining an amount of charge removed as a result of each bias, separately. In one embodiment, an endpoint is determined for each bias when the amount of charge removed for a bias substantially equals a respective target charge calculated for the bias.

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