4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with the removal of material by nonchemical means

Alain Duboust

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Algorithm for real-time process control of electro-polishing

Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – With control responsive to sensed condition
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Algorithm for real-time process control of electro-polishing

Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – With control responsive to sensed condition
Reexamination Certificate

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Apparatus and method for fast-cycle atomic layer deposition

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
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Articles for polishing semiconductor substrates

Abrading – Flexible-member tool – per se – Interrupted or composite work face
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Biased retaining ring

Chemistry: electrical and wave energy – Apparatus – Electrolytic
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Profile ID: LFUS-PAI-P-2412332

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