Barrier seal for electrostatic chuck

Details Barrier seal for electrostatic chuck Barrier seal for electrostatic chuck

1995-05-11

1997-06-03

Fleming, Fritz

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

H02N 1300

Patent

active

056360983

ABSTRACT:
An erosion resistant electrostatic chuck 20 for holding a substrate 45 having a peripheral edge 50, in an erosive environment, comprises an electrostatic member 25 including (i) an electrode 30, and (ii) an insulator 35 covering the electrode. A barrier 55 is circumferentially disposed about the electrostatic member 25. The barrier 55 comprises a first contact surface 60 capable of being pressed against the peripheral edge 50 of the substrate 45 to form a seal around the substrate 45 to reduce exposure of the electrostatic member 25 of the chuck 20 to the erosive environment.

REFERENCES:
patent: 5452177 (1995-09-01), Frutiger
patent: 5484485 (1996-01-01), Chapman
patent: 5486975 (1996-01-01), Shamouilian et al.

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