4. Electricity: electrical systems and devices
  5. Electric charge generating or conducting means
  6. Use of forces of electric charge or field

Dennis Grimard

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Apparatus for regulating temperature of a process kit in a...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Barrier seal for electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Inductively coupled RF plasma reactor having an overhead solenoi

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Inductively coupled RF Plasma reactor having an overhead...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Plasma generation and control using a dual frequency RF source

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Profile ID: LFUS-PAI-P-619387

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