Polishing pad with window

Details Polishing pad with window Polishing pad with window

2007-09-04

2007-09-04

Rose, Robert A. (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

By optical sensor

C451S527000, C451S533000

Reexamination Certificate

active

10669544

ABSTRACT:
A polishing layer of a polishing has a window member with a top surface positioned a predetermined distance below the polishing surface. A transparent layer can be positioned below the polishing layer and supporting the window member.

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