4. Etching a substrate: processes
  5. Nongaseous phase etching of substrate
  6. With measuring, testing, or inspecting

Dominic J. Benvegnu

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Determining physical property of substrate

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Determining physical property of substrate

Optics: measuring and testing – Dimension – Thickness
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Friction sensor for polishing system

Abrading – Precision device or process - or with condition responsive... – Computer controlled
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Iso-reflectance wavelengths

Data processing: measuring – calibrating – or testing – Measurement system – Dimensional determination
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Method of making and apparatus having polishing pad with window

Abrading – Precision device or process - or with condition responsive... – By optical sensor
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Profile ID: LFUS-PAI-P-2266613

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