4. Abrading
  5. Work holder
  6. Work rotating

Kerry F. Hughes

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Method of making and apparatus having polishing pad with window

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Polishing pad with window

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Retaining ring with shaped surface

Abrading – Abrading process – Combined abrading
Reexamination Certificate

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Retaining ring with shaped surface

Abrading – Work holder – Work rotating
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2281239

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