Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
Reexamination Certificate
2011-08-23
2011-08-23
Philogene, Haiss (Department: 2821)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With measuring, sensing, detection or process control means
C156S345440, C156S345240, C156S345200, C315S111210
Reexamination Certificate
active
08002945
ABSTRACT:
A method is provided in plasma processing of a workpiece for stabilizing the plasma against engineered transients in applied RF power, by modulating an unmatched low power RF generator in synchronism with the transient.
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Official Action Dated Jan. 3, 2011 Issued in Co-Pending U.S. Appl. No. 12/129,244.
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Collins Kenneth S.
Hoffman Daniel J.
Miller Matthew L.
Ramaswamy Kartik
Shannon Steven C.
Applied Materials Inc.
Philogene Haiss
Wallace Robert M.
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