4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Kartik Ramaswamy

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Apparatus for multiple frequency power application

Wave transmission lines and networks – Automatically controlled systems – Impedance matching
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Chemical vapor deposition plasma process using an ion shower...

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of coating supply or source outside of primary...
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Chemical vapor deposition plasma process using plural ion...

Coating processes – Coating by vapor – gas – or smoke
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Copper barrier reflow process employing high speed optical...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Electrostatic chuck with smart lift-pin mechanism for a...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Profile ID: LFUS-PAI-P-2228928

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