Method and apparatus for the use of diamond films as dielectric

Details Method and apparatus for the use of diamond films as dielectric Method and apparatus for the use of diamond films as dielectric

1996-06-14

1998-09-22

Fleming, Fritz

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

279128, H02N 1300

Patent

active

058123628

ABSTRACT:
An electrostatic chuck for supporting substrates in a substrate processing chamber during processing. The chuck includes a diamond layer that overlies an electrically conductive element. The chuck has increased clamping force and improved resistance to etching. In one embodiment, the diamond layer is an insulating layer while in another it is a conducting layer with uniform surface roughness.

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