Tapping atomic force microscope with phase or frequency detectio

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

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73105, 250306, 250307, G01B 734

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active

RE0364886

ABSTRACT:
An atomic force microscope in which a probe tip is oscillated at a resonant frequency and at amplitude setpoint and scanned across the surface of a sample, which may include an adsorbed water layer on its surface, at constant amplitude in intermittent contact with the sample and changes in phase or in resonant frequency of the oscillating are measured to determine adhesion between the probe tip and the sample. The setpoint amplitude of oscillation of the probe is greater than 10 nm to assure that the energy in the lever arm is much higher than that lost in each cycle by striking the sample surface, thereby to avoid sticking of the probe tip to the sample surface. In one embodiment the probe tip is coated with an antibody or an antigen to locate corresponding antigens or antibodies on the sample as a function of detected variation in phase or frequency. In another embodiment, the frequency of oscillation of the probe tip is modulated and relative changes in phase of the oscillating probe tip observed in order to measure the damping of the oscillation due to the intermittent or constant tapping of the surface by the tip. In a further embodiment, the slope of the phase versus frequency curve is determined and outputted during translating of the oscillating probe. Force dependent sample characteristics are determined by obtaining data at different tapping amplitude setpoints and comparing the data obtained at the different tapping amplitude setpoints.

REFERENCES:
patent: Re33387 (1990-10-01), Binnig
patent: Re34489 (1993-12-01), Hansma et al.
patent: 2405133 (1946-08-01), Brown et al.
patent: 2460726 (1949-02-01), Arndt, Jr. et al.
patent: 3049002 (1962-08-01), Hediger
patent: 3378648 (1968-04-01), Fenner
patent: 4106333 (1978-08-01), Salje et al.
patent: 4359892 (1982-11-01), Schnell et al.
patent: 4724318 (1988-02-01), Binnig
patent: 4868396 (1989-09-01), Lindsay
patent: 4902892 (1990-02-01), Okayama et al.
patent: 4935634 (1990-06-01), Hansma et al.
patent: 5015850 (1991-05-01), Zdeblick et al.
patent: 5047633 (1991-09-01), Finlan et al.
patent: 5162653 (1992-11-01), Hosaka et al.
patent: 5186041 (1993-02-01), Nyyssonen
patent: 5189906 (1993-03-01), Elings et al.
patent: 5212987 (1993-05-01), Dransfeld et al.
patent: 5224376 (1993-07-01), Elings et al.
patent: 5229606 (1993-07-01), Elings et al.
patent: 5237859 (1993-08-01), Elings et al.
patent: 5254854 (1993-10-01), Betzig
patent: 5266801 (1993-11-01), Elings et al.
patent: 5289004 (1994-02-01), Okada et al.
patent: 5308974 (1994-05-01), Elings et al.
patent: 5345815 (1994-09-01), Albrecht et al.
patent: 5347854 (1994-09-01), Martin et al.
patent: 5363697 (1994-11-01), Nakagawa
patent: 5406832 (1995-04-01), Gamble et al.
patent: 5408094 (1995-04-01), Kajimura
patent: 5412980 (1995-05-01), Elings et al.
patent: 5415027 (1995-05-01), Elings et al.
patent: 5418363 (1995-05-01), Elings et al.
patent: 5436448 (1995-07-01), Hosaka et al.
patent: 5481908 (1996-01-01), Gamble
patent: 5519212 (1996-05-01), Elings et al.
patent: 5625142 (1997-04-01), Gamble
patent: 5681987 (1997-10-01), Gamble
patent: 5742172 (1998-04-01), Yasutake
G. Binnig et al., "Atomic Force Microscope", Physical Review Letters, vol. 56, No. 9, pp. 930-933, Mar. 3, 1986.
L. M. Roylance et al., "A Batch-Fabricated Silicon Accelerometer" IEEE Transactions on Electron Devices, vol. ED-26, No. 12, pp. 11-1917, Dec. 1979.
W. A. Ducker et al., "Force measurement using an ac atomic force microscope", J. Appl. Phys., vol. 67, No. 9, May 1, 1990, pp. 4045-4052.
A. L. Weisenhorn et al., "Forces in atomic force microscopy in air and water", Appl. Phys. Lett, vol. 54, No. 26, Jun. 26, 1989, pp. 2651-2653.
Giambattista et al, "Atomic resolution images of solid-liquid interfaces", Proc. Natl. Acad. Sci. USA, vol. 84, pp. 4671-4674, Jul. 1987.
IBM Technical Disclosure Bulletin, vol. 32, No. 7, Dec. 7, 1989, New York, U.S., p. 168 "Microprobe-Based CD Measurement Tool".
P.C.D. Hobbs, et al., "atomic Force Microscope: Implementations", SPIE vol. 897 canning Microscopy Technologies and Applications (1988), pp. 27-30.
M. Anders et al., "Potentiometry for thin-film structures", J.Vac. Sci. Technol. A, vol. 8, No. 1, Jan.Feb. 1990, pp. 394-399.
R. Elandsson et al., "Atomic force microscopy using optical interferometry", J.Vac. Sci. Technol. A, vol. 6, No. 2, Mar./Apr. 1988, pp. 266-270.
William A. Ducker et al., "Rapid measurement of static and dynamic surface forces", Appl. Phys. Lett, vol. 56, No. 24, Jun. 11, 1990, pp. 2408-2410.
T.R. Albrecht et al., "Frequency modulation detection using . . . sensitivity", J. Appl. Phys., vol. 69, No. 2, Jan. 15, 1991, pp. 668673.
D. Sarid et al., "Review of scanning force microscopy", J. Vac. Sci. Technol. B vol. 9, No. 2, Mar./Apr. 1991, pp. 431-437.
D. Rugar et al., "Magnetic force microscopy: General principles . . . media", J.Appl. Phys., vol. 68, No. 3, Aug. 1, 1990, pp. 1169-1183.
McGraw-Hill Dictionary of Scientific and Technical Terms, p. 2117.
Encyclopedia of Physics, 2.sup.nd Ed. Interatomic and Inermolecular Forces. p. 545.
R. Erlandsson et al., "A scanning force microscope designed for . . . ", Microscopy, Microanalysis, Microstructures 1(1990) pp. 471-480.
AutoProbe XL2, Multiple Mode Large Sample AFM for Sub-angstrom Resolution, Park Scientific Instruments, 2 pages.
Frisbie et al., "Functional Group Imaging by Chemical Force Microscopy", Science, vol. 265, Sep. 10, 1994, pp. 2071-2073.
Umemura et al, "High resolution Images of Cell Surface Using a Tapping-Mode Atomic Force Microscope", Jpn. J. Appl. Phys. vol. 32 (1993) pp. L1711-L1714, Part 2, No. 11B, Nov. 15, 1993.
Martin et al., "Atomic force microscope-force mapping and profiling on a sub 100 .ANG. scale", J.Appl. Phys. vol. 61, No. 10, May 15, 1987.
Umeda et al., "Scanning attractive force microscope using photothermal vibration", J. Vac. Sci. Technol. B, vol. 9, No. 2, Mar./Apr. 1991, pp. 1318-1322.
Marti et al., "Mechanical and thermal effects of laser irradiation on force microscope cantilevers", Ultramicroscopy 42-44 (1992) pp. 345-350 (published Jul. 1992).
Nyyssonen et al., "Two-dimensional atomic force microprobe trench metrology system", J. Vac. Sci. Technol., B9, 3612-3616 (1991) Nov./Dec.
Nyyssonen et al., application of a two-dimensional atomic force microscope system to metrology, Proc. SPIE, vol. 1556, 79-87 (1991).
Tansock et al., "Force measurement with a piezoelectric cantilever in a scanning force microscope", Ulramicroscopy 42-44 (1992) 1464-1469.
Webster's New Dictionary of Synonyms, p. 784-785 and p. 812-813.

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