X-Ray lithographic apparatus

Details X-Ray lithographic apparatus X-Ray lithographic apparatus

1983-12-02

1985-05-07

Smith, Alfred E.

X-ray or gamma ray systems or devices

Specific application

Lithography

378 35, H01J 0000

Patent

active

045162549

ABSTRACT:
The present invention consists in an X-ray lithographic apparatus having an X-ray generator which generates X-rays, and a gastight chamber which is gastightly coupled to the X-ray generator and which holds a mask to be exposed to the X-rays, on its surface remote from the X-ray generator, characterized in that the gastight chamber is provided with a window on which a soft member softer than the mask is mounted.

REFERENCES:
patent: 4403336 (1983-09-01), Taniguchi et al.

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