4. Supports
  5. Supporting base
  6. Including attachment or holder for article

Yoshihiro Komeyama

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Alignment apparatus with optical length-varying optical system

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Method and apparatus for alignment

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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Precision parallel translation system

Supports – Supporting base – Including attachment or holder for article
Patent

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Projection alignment method and apparatus

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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X-ray exposure apparatus

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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Profile ID: LFUS-PAI-P-231753

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