Wafer processing system

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports

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Details

25049221, 414217, 414225, G21K 510, B65H 100

Patent

active

047059516

ABSTRACT:
A wafer processing system including wafer handling arms incorporated into vacuum isolation valves is described. A loadlock with elevator and optical sensors is used to inventory and position a cassette of wafers. The wafers in the cassette can be randomly accessed. A computer is used to control the system according to a task status table independent of time sequence.

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