4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Analyte supports

Michael J. Kuhlman

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Door systems for low contamination, high throughput handling...

Movable or removable closures – With operator for movably mounted closure – Operating lever or link and closure swing about parallel axes
Reexamination Certificate

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System for measuring the position of a wafer in a cassette

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent

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Systems and methods for low contamination, high throughput...

Receptacles – Closures – With closure opening arrangements for means
Reexamination Certificate

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Systems and methods for robotic transfer of workpieces...

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Wafer processing system

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent

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Profile ID: LFUS-PAI-P-1213446

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