Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1986-04-17
1987-11-10
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
25049221, 414217, 414225, G21K 510, B65H 100
Patent
active
047059516
ABSTRACT:
A wafer processing system including wafer handling arms incorporated into vacuum isolation valves is described. A loadlock with elevator and optical sensors is used to inventory and position a cassette of wafers. The wafers in the cassette can be randomly accessed. A computer is used to control the system according to a task status table independent of time sequence.
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Coad George L.
Dick Paul H.
Hobson Phillip M.
Huntley David A.
Kuhlman Michael J.
Anderson Bruce C.
Cole Stanley Z.
Fisher Gerald M.
Varian Associates Inc.
Warsh Kenneth L.
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