Valves and valve actuation – With means to increase head and seat contact pressure – Fluid pressure
Reexamination Certificate
2004-11-16
2010-11-30
Stashick, Anthony (Department: 3781)
Valves and valve actuation
With means to increase head and seat contact pressure
Fluid pressure
C251S030020, C251S094000, C220S240000
Reexamination Certificate
active
07841582
ABSTRACT:
Techniques for a door system for sealing an opening between two chambers in a semiconductor processing system are described. A sealing member seals the opening when a door is in a closed position. To selectively open and close the opening, an actuator moves the door. A valve actuator switch provides a first or second pressure to the actuator depending on the pressure inside a first chamber. In one embodiment, a sensor monitors the pressure inside the first chamber.
REFERENCES:
patent: 6347918 (2002-02-01), Blahnik
patent: 6647665 (2003-11-01), Tabrizi et al.
patent: 6647918 (2003-11-01), Welch et al.
patent: 6905107 (2005-06-01), Blahnik
patent: 7007919 (2006-03-01), Blonigan et al.
patent: 2004/0206921 (2004-10-01), Blonigan et al.
patent: 2004/0247787 (2004-12-01), Mackie et al.
Bang Won B.
Tran Toan Q.
Wang Yen-Kun Victor
Applied Materials Inc.
McKinley Christopher B
Stashick Anthony
Townsend and Townsend and Crew
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