4. Fluid handling
  5. Systems
  6. With flow control means for branched passages

Toan Q. Tran

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Cluster valve for semiconductor wafer processing systems

Fluid handling – Systems – With flow control means for branched passages
Reexamination Certificate

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Lift pin assembly for substrate processing

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Remote plasma source seasoning

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Slit valve

Valves and valve actuation – With means to increase head and seat contact pressure – Gate valve
Reexamination Certificate

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Variable seal pressure slit valve doors for semiconductor...

Valves and valve actuation – With means to increase head and seat contact pressure – Fluid pressure
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2016581

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