4. Electric heating
  5. Metal heating
  6. Of cylinders

Yen-Kun Victor Wang

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Low profile thick film heaters in multi-slot bake chamber

Electric heating – Metal heating – Of cylinders
Reexamination Certificate

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Variable seal pressure slit valve doors for semiconductor...

Valves and valve actuation – With means to increase head and seat contact pressure – Fluid pressure
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2595873

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