Variable cell size collimator

Details Variable cell size collimator Variable cell size collimator

1995-10-04

1997-07-22

Weisstuch, Aaron

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20429811, C23C 1434

Patent

active

056500521

ABSTRACT:
Sputtering apparatus and method suitable for forming a step coating on a workpiece. A workpiece is supported in a chamber, particles are emitted from a sputtering source, and the particles are passed through a collimating filter having a plurality of transmissive cells positioned between the sputtering source and the workpiece to limit the angles at which the particles can be deposited onto the workpiece. The collimating filter varies in height from a center portion to an outer portion while preferably maintaining a constant cell aspect ratio.

REFERENCES:
patent: 5415753 (1995-05-01), Hurwitt et al.
patent: 5505833 (1996-04-01), Werner et al.

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