Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
Inventor
active
Blanket-selective chemical vapor deposition using an ultra-thin
Cleaning of native oxide with hydrogen-containing radicals
Collimation hardware with RF bias rings to enhance sputter and/o
Construction of a film on a semiconductor wafer
Construction of a film on a semiconductor wafer
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Profile ID: LFUS-PAI-P-20364