UV assisted thermal processing

Details UV assisted thermal processing UV assisted thermal processing

2006-05-01

2009-06-16

Nguyen, Kiet T (Department: 2881)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S677000

Reexamination Certificate

active

07547633

ABSTRACT:
The present invention provides methods and apparatus for performing thermal processes to a semiconductor substrate. Thermal processing chambers of the present invention comprise two different energy sources, such as an infrared radiation source and a UV radiation source. The UV radiation source and the infrared radiation source may be used alone or in combination to supply heat, activate electronic, or create active species inside the thermal processing chamber.

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