4. Coating apparatus
  5. Gas or vapor deposition

Yoshitaka Yokota

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Dual frequency low temperature oxidation of a semiconductor...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Methods for silicon oxide and oxynitride deposition using...

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Thermal oxidation of silicon using ozone

Coating apparatus – Gas or vapor deposition
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Thermal reactor with improved gas flow distribution

Coating apparatus – With means to apply electrical and/or radiant energy to work... – Radiant heating
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UV assisted thermal processing

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Profile ID: LFUS-PAI-P-2316310

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