4. Electricity: electrical systems and devices
  5. Electric charge generating or conducting means
  6. Use of forces of electric charge or field

Canfeng Lai

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Atmospheric substrate processing apparatus for depositing...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Directing a flow of gas in a substrate processing chamber

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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High-permeability magnetic shield for improved process...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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In situ application of etch back for improved deposition...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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In situ application of etch back for improved deposition...

Semiconductor device manufacturing: process – Chemical etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1519499

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