Coating apparatus
Gas or vapor deposition
Multizone chamber
Corporate Assignee
active
No affiliations
Thermal processing method and apparatus therefor
Treatment system including a plurality of treatment apparatus
LandOfFree
Tokyo Electron Kabushiki does not yet have a rating. At this time, there are no reviews or comments for this inventor.
If you have personal experience with Tokyo Electron Kabushiki, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Tokyo Electron Kabushiki will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-P-397671