Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate
2011-05-24
2011-05-24
Le, Thao X (Department: 2892)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
C257SE21414
Reexamination Certificate
active
07947539
ABSTRACT:
A method of manufacturing a thin film transistor array panel includes forming gate lines including gate electrodes on an insulation substrate; forming a gate insulating layer, semiconductor layer, and etch stop layer on the gate lines; etching and patterning the etch stop and semiconductor layers at the same time using photolithography; ashing and partially removing a photoresist film pattern used in the patterning of the etch stop and semiconductor layers; etching the etch stop layer exposed by removed portions of the photoresist film pattern to form etch stop members; depositing ohmic contact and data metal layers onto the etch stop members, etching the ohmic contact and data metal layers at the same time using photolithography to form data lines having source and drain electrodes, and ohmic contact members below the source and drain electrodes; forming a passivation layer on the data lines and drain electrodes; and forming pixel electrodes on the passivation layer.
REFERENCES:
patent: 5352907 (1994-10-01), Matsuda et al.
patent: 5874326 (1999-02-01), Lyu
patent: 6107640 (2000-08-01), Park et al.
patent: 6166400 (2000-12-01), Chang et al.
patent: 6399428 (2002-06-01), Nakahori et al.
patent: 6597415 (2003-07-01), Rho et al.
patent: 7115906 (2006-10-01), Lai
patent: 2004/0036816 (2004-02-01), Yun
patent: 2005/0082968 (2005-04-01), Choi et al.
patent: 2005/0242347 (2005-11-01), Lai
patent: 2006/0050192 (2006-03-01), Cho et al.
patent: 2008/0003726 (2008-01-01), Park
patent: 1632675 (2005-06-01), None
patent: 1728363 (2006-02-01), None
patent: 07-218931 (1995-08-01), None
patent: 08-321621 (1996-12-01), None
patent: 10-186408 (1998-07-01), None
patent: 11-121762 (1999-04-01), None
patent: 2003-228082 (2003-08-01), None
patent: 2005-108931 (2005-04-01), None
patent: 1994-008124 (1994-04-01), None
patent: 1996-006080 (1996-02-01), None
patent: 1998-012127 (1998-04-01), None
patent: 1020020054911 (2002-07-01), None
patent: 1020030032242 (2003-04-01), None
patent: 10-0522436 (2005-10-01), None
English abstract of KR 1020040070979 for related application KR10-0522436, Apr. 30, 1998.
F. Chau & Associates LLC
Le Thao X
Samsung Electronics Co,. Ltd.
Trice Kimberly
LandOfFree
Thin film transistor array panel for a display device and a... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Thin film transistor array panel for a display device and a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thin film transistor array panel for a display device and a... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2681854