Thin film transistor array panel and fabrication

Details Thin film transistor array panel and fabrication Thin film transistor array panel and fabrication

2008-05-13

2008-05-13

Huynh, Andy (Department: 2818)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

C438S151000, C257SE21414

Reexamination Certificate

active

11486330

ABSTRACT:
The present invention provides a manufacturing method of a thin film transistor array panel, which includes forming a gate line on a substrate; forming a gate insulating layer, a semiconductor layer, and an ohmic contact on the gate line; forming a first conducting film including Mo, a second conducting film including Al, and a third conducting film including Mo on the ohmic contact; forming a first photoresist pattern on the third conducting film; etching the first, second, and third conducting films, the ohmic contact, and the semiconductor layer using the first photoresist pattern as a mask; removing the first photoresist pattern by a predetermined thickness to form a second photoresist pattern; etching the first, second, and third conducting films using the second photoresist pattern as a mask to expose a portion of the ohmic contact; and etching the exposed ohmic contact using a Cl-containing gas and a F-containing gas.

REFERENCES:
patent: 7253035 (2007-08-01), Kwak
patent: 2002/0117691 (2002-08-01), Choi et al.
patent: 6-69236 (1994-03-01), None
patent: 6-267983 (1994-09-01), None
patent: 2000-56284 (2000-02-01), None
patent: 2004-119923 (2004-04-01), None
patent: 1999-0066167 (1999-08-01), None
patent: 2001-0091799 (2001-10-01), None
Patent Abstracts of Japan, Publication No. 06-069236, Mar. 11, 1994, 1 page.
Patent Abstracts of Japan, Publication No. 2004-119923, Apr. 15, 2004, 1 page.
Patent Abstracts of Japan, Publication No. 06-267983, Sep. 22, 1994, 1 page.
Patent Abstracts of Japan, Publication No. 2000-056284, Feb. 25, 2000, 1 page.
Korean Patent Abstract of Publication No. 1999-0066167, Aug. 16, 1998, 1 page.
Korean Patent Abstract, Publication No. 1020010091799 A, Oct. 23, 2001, 1 page.

Affiliated with

Also associated with

Rating

Thin film transistor array panel and fabrication does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thin film transistor array panel and fabrication, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thin film transistor array panel and fabrication will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3959770