Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2005-07-26
2009-02-10
Vanore, David A. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S397000, C250S305000, C250S306000, C250S311000, C324S701000
Reexamination Certificate
active
07488936
ABSTRACT:
A TFT array inspecting apparatus inspects a TFT array disposed at either an inclined position and a level position. The TFT array inspecting apparatus includes a vacuum chamber, a stage disposed in the vacuum chamber so that a TFT array to be inspected is disposed on the stage, an electron gun disposed opposite to the stage in the vacuum chamber to generate an electron beam onto the TFT array, an electron detecting unit to detect secondary electrons emitted from the TFT array by the electron gun, and at least one elevating unit to move the TFT array move between a level position and an inclined position having a designated angle with the level position.
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Ahn Hyeong Min
Antonov Sergey
Choi Ho Seok
Ha Jeong Su
Lenyashine Vasily
Logie Michael
Samsung Electronics Co,. Ltd.
Stanzione & Kim LLP
Vanore David A.
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