Tantalum lanthanide oxynitride films

Details Tantalum lanthanide oxynitride films Tantalum lanthanide oxynitride films

2006-08-31

2009-06-09

Lebentritt, Michael S (Department: 2829)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S591000, C438S641000, C438S674000, C438S785000, C257SE21013, C257SE21021, C257SE21168, C257SE21171, C257SE21197, C257SE21209, C257SE21274, C257SE21396, C257SE27087, C257SE29302

Reexamination Certificate

active

07544604

ABSTRACT:
Electronic apparatus and methods of forming the electronic apparatus include a tantalum lanthanide oxynitride film on a substrate for use in a variety of electronic systems. The tantalum lanthanide oxynitride film may be structured as one or more monolayers. Metal electrodes may be disposed on a dielectric containing a tantalum lanthanide oxynitride film.

REFERENCES:
patent: 4542870 (1985-09-01), Howell
patent: 5252370 (1993-10-01), Tominaga et al.
patent: 5334433 (1994-08-01), Tominaga
patent: 5364708 (1994-11-01), Tominaga
patent: 5401609 (1995-03-01), Haratani et al.
patent: 5406546 (1995-04-01), Uchiyama et al.
patent: 5418030 (1995-05-01), Tominaga et al.
patent: 5430706 (1995-07-01), Utsunomiya et al.
patent: 5470628 (1995-11-01), Tominaga et al.
patent: 5498507 (1996-03-01), Handa et al.
patent: 5523140 (1996-06-01), Tominaga et al.
patent: 5552237 (1996-09-01), Utsunomiya et al.
patent: 5569517 (1996-10-01), Tominaga et al.
patent: 5577020 (1996-11-01), Utsunomiya et al.
patent: 5593789 (1997-01-01), Utsunomiya et al.
patent: 5620766 (1997-04-01), Uchiyama et al.
patent: 5627012 (1997-05-01), Tominaga et al.
patent: 5637371 (1997-06-01), Tominaga et al.
patent: 5637372 (1997-06-01), Tominaga et al.
patent: 5700567 (1997-12-01), Utsunomiya
patent: 5825046 (1998-10-01), Czubatyj et al.
patent: 5891542 (1999-04-01), Tominaga et al.
patent: 5906874 (1999-05-01), Takahashi et al.
patent: 5965323 (1999-10-01), Takahashi et al.
patent: 5981014 (1999-11-01), Tsukagoshi et al.
patent: 6002418 (1999-12-01), Yoneda et al.
patent: 6020024 (2000-02-01), Maiti et al.
patent: 6030679 (2000-02-01), Saito et al.
patent: 6040030 (2000-03-01), Utsunomiya et al.
patent: 6051363 (2000-04-01), Utsunomiya et al.
patent: 6061077 (2000-05-01), Kashiwaya et al.
patent: 6081287 (2000-06-01), Noshita et al.
patent: 6087067 (2000-07-01), Kato et al.
patent: 6087674 (2000-07-01), Ovshinsky et al.
patent: 6103330 (2000-08-01), Kosuda et al.
patent: 6136168 (2000-10-01), Masujima et al.
patent: 6137520 (2000-10-01), Kashiwaya et al.
patent: 6153355 (2000-11-01), Takahashi et al.
patent: 6175377 (2001-01-01), Noshita et al.
patent: 6242157 (2001-06-01), Tominaga et al.
patent: 6243941 (2001-06-01), Kashiwaya et al.
patent: 6256052 (2001-07-01), Yoneda
patent: 6256053 (2001-07-01), Noshita et al.
patent: 6316054 (2001-11-01), Kashiwaya et al.
patent: 6329036 (2001-12-01), Kikukawa et al.
patent: 6337704 (2002-01-01), Yamaguchi
patent: 6351276 (2002-02-01), Yamaguchi
patent: 6358766 (2002-03-01), Kasahara
patent: 6383873 (2002-05-01), Hegde et al.
patent: 6406772 (2002-06-01), Tominaga et al.
patent: 6410368 (2002-06-01), Kawasaki et al.
patent: 6426245 (2002-07-01), Kawasaki et al.
patent: 6461710 (2002-10-01), Kikukawa et al.
patent: 6492659 (2002-12-01), Yamazaki et al.
patent: 6495436 (2002-12-01), Ahn et al.
patent: 6514828 (2003-02-01), Ahn et al.
patent: 6531354 (2003-03-01), Maria et al.
patent: 6534420 (2003-03-01), Ahn et al.
patent: 6537721 (2003-03-01), Inoue et al.
patent: 6555875 (2003-04-01), Kawasaki et al.
patent: 6558563 (2003-05-01), Kashiwaya et al.
patent: 6599788 (2003-07-01), Kawasaki et al.
patent: 6613695 (2003-09-01), Pomarede et al.
patent: 6624013 (2003-09-01), Kawasaki et al.
patent: 6653657 (2003-11-01), Kawasaki et al.
patent: 6660660 (2003-12-01), Haukka et al.
patent: 6673701 (2004-01-01), Marsh et al.
patent: 6688951 (2004-02-01), Kashiwaya et al.
patent: 6730163 (2004-05-01), Vaartstra
patent: 6730164 (2004-05-01), Vaartstra et al.
patent: 6731590 (2004-05-01), Shingai et al.
patent: 6748959 (2004-06-01), Kashiwaya et al.
patent: 6750126 (2004-06-01), Visokay et al.
patent: 6753567 (2004-06-01), Maria et al.
patent: 6762081 (2004-07-01), Yamazaki et al.
patent: 6762114 (2004-07-01), Chambers
patent: 6767795 (2004-07-01), Ahn et al.
patent: 6770923 (2004-08-01), Nguyen et al.
patent: 6784049 (2004-08-01), Vaartstra
patent: 6784101 (2004-08-01), Yu et al.
patent: 6794284 (2004-09-01), Vaartstra
patent: 6809370 (2004-10-01), Colombo et al.
patent: 6812517 (2004-11-01), Baker
patent: 6844203 (2005-01-01), Ahn et al.
patent: 6844249 (2005-01-01), Kawasaki et al.
patent: 6852645 (2005-02-01), Colombo et al.
patent: 6863725 (2005-03-01), Vaartstra et al.
patent: 6893984 (2005-05-01), Ahn et al.
patent: 6900122 (2005-05-01), Ahn et al.
patent: 6909156 (2005-06-01), Aoyama
patent: 6916398 (2005-07-01), Chen et al.
patent: 6921702 (2005-07-01), Ahn et al.
patent: 6929840 (2005-08-01), Hosoda et al.
patent: 6936508 (2005-08-01), Visokay et al.
patent: 6953730 (2005-10-01), Ahn et al.
patent: 6958300 (2005-10-01), Vaartstra et al.
patent: 6958302 (2005-10-01), Ahn et al.
patent: 6960538 (2005-11-01), Ahn et al.
patent: 6967154 (2005-11-01), Meng et al.
patent: 6967159 (2005-11-01), Vaartstra
patent: 6979623 (2005-12-01), Rotondaro et al.
patent: 6979855 (2005-12-01), Ahn et al.
patent: 6984592 (2006-01-01), Vaartstra
patent: 6989573 (2006-01-01), Ahn et al.
patent: 6995081 (2006-02-01), Vaartstra
patent: 7014903 (2006-03-01), Takasaki et al.
patent: 7015534 (2006-03-01), Colombo
patent: 7018694 (2006-03-01), Hosoda et al.
patent: 7018695 (2006-03-01), Kakiuchi et al.
patent: 7019351 (2006-03-01), Eppich et al.
patent: 7026694 (2006-04-01), Ahn et al.
patent: 7030042 (2006-04-01), Vaartstra et al.
patent: 7037862 (2006-05-01), Ahn et al.
patent: 7041609 (2006-05-01), Vaartstra
patent: 7045430 (2006-05-01), Ahn et al.
patent: 7045431 (2006-05-01), Rotondaro et al.
patent: 7049192 (2006-05-01), Ahn et al.
patent: 7068544 (2006-06-01), Forbes et al.
patent: 7077902 (2006-07-01), Vaartstra
patent: 7081421 (2006-07-01), Ahn et al.
patent: 7084078 (2006-08-01), Ahn et al.
patent: 7087481 (2006-08-01), Vaartstra et al.
patent: 7091119 (2006-08-01), Colombo
patent: 7101813 (2006-09-01), Ahn et al.
patent: 7112485 (2006-09-01), Vaartstra
patent: 7115166 (2006-10-01), Bodor et al.
patent: 7115528 (2006-10-01), Vaartstra et al.
patent: 7115530 (2006-10-01), Quevedo-Lopez et al.
patent: 7115566 (2006-10-01), Bodor et al.
patent: 7122409 (2006-10-01), Kawasaki et al.
patent: 7122464 (2006-10-01), Vaartstra
patent: 7125815 (2006-10-01), Vaartstra
patent: 7135361 (2006-11-01), Visokay et al.
patent: 7135369 (2006-11-01), Ahn et al.
patent: 7135370 (2006-11-01), Baker
patent: 7135421 (2006-11-01), Ahn et al.
patent: 7136343 (2006-11-01), Inoue et al.
patent: 7141288 (2006-11-01), Inoue et al.
patent: 7141289 (2006-11-01), Inoue et al.
patent: 7144825 (2006-12-01), Adetutu et al.
patent: 7148546 (2006-12-01), Visokay et al.
patent: 7154836 (2006-12-01), Inoue et al.
patent: 7157128 (2007-01-01), Inoue et al.
patent: 7160577 (2007-01-01), Ahn et al.
patent: 7160597 (2007-01-01), Inoue et al.
patent: 7161894 (2007-01-01), Judge
patent: 7166347 (2007-01-01), Inoue et al.
patent: 7167440 (2007-01-01), Inoue et al.
patent: 7176076 (2007-02-01), Chambers et al.
patent: 7182990 (2007-02-01), Inoue et al.
patent: 7183186 (2007-02-01), Ahn et al.
patent: 7195999 (2007-03-01), Forbes et al.
patent: 7196007 (2007-03-01), Vaartstra
patent: 7199023 (2007-04-01), Ahn et al.
patent: 7208793 (2007-04-01), Bhattacharyya
patent: 7214416 (2007-05-01), Nakai et al.
patent: 7226830 (2007-06-01), Colombo et al.
patent: 7235501 (2007-06-01), Ahn et al.
patent: 7235854 (2007-06-01), Ahn et al.
patent: 7250367 (2007-07-01), Vaartstra et al.
patent: 7253122 (2007-08-01), Vaartstra
patent: 7271077 (2007-09-01), Vaartstra et al.
patent: 7279732 (2007-10-01), Meng et al.
patent: 7291526 (2007-11-01), Li
patent: 7294556 (2007-11-01), Vaartstra
patent: 7300870 (2007-11-01), Vaartstra
patent: 7332442 (2008-02-01), Vaatstra et al.
patent: 7374617 (2008-03-01), Vaartstra
patent: 7368402 (2008-05-01), Vaartstra
patent: 7410918 (2008-08-01), Vaarstra
patent: 7432548 (2008-10-01), Forbes et al.
patent: 2001/0015441 (2001-08-01), Kawasaki et al.
patent: 2001/0031332 (2001-10-01), Tominaga et al.
patent: 2001/0032995 (2001-10-01), Maria et al.
patent: 2001/0054598 (2001-12-01), Kashiwaya et al.
patent: 2002/0089023 (2002-07-01), Yu et al.
patent: 2002/0121665 (2002-09-01), Kawasaki et al.
patent: 2002/0137330 (2002-09-01), Ryan
patent:

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