Optical: systems and elements – Having significant infrared or ultraviolet property – Multilayer filter or multilayer reflector
Reexamination Certificate
2005-06-27
2009-08-11
Fineman, Lee (Department: 2872)
Optical: systems and elements
Having significant infrared or ultraviolet property
Multilayer filter or multilayer reflector
C359S224100
Reexamination Certificate
active
07573634
ABSTRACT:
The invention relates to micromechanical mirrors with a high-reflection coating for the deep-ultraviolet (DUV) and vacuum-ultraviolet (VUV) spectral range, based on a substrate which is coated with an aluminum layer and a transparent blooming coating. Likewise the invention relates to a method for the production of such micromechanical layers with a high-reflection coating and to the use thereof for the production of microsensors, optical data stores or video and data projection displays.
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Gatto Alexandre
Heber Jörg
Kaiser Norbert
Sandner Thilo
Schenk Harald
Dernier, Esq. Matthew B.
Fineman Lee
Fraunhofer-Gesellschaft Zür Förderung Der Angewandten
Gibson & Dernier LLP
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