Tailored temperature uniformity

Details Tailored temperature uniformity Tailored temperature uniformity

2006-10-24

2006-10-24

Nghiem, Michael (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system

Temperature measuring system

Reexamination Certificate

active

07127367

ABSTRACT:
Method and apparatus for obtaining a tailored heat transfer profile in a chamber housing a microprocessor manufacturing process, including estimating heat transfer properties of the chamber; estimating heat absorptive properties of a wafer; adjusting the physical characteristics of the chamber to correct the heat transfer properties; and utilizing the chamber for manufacturing microprocessors.

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