4. Electric resistance heating devices
  5. Heating devices
  6. Radiant heater

Aaron Hunter

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Adaptive control method for rapid thermal processing of a...

Measuring and testing – Fluid pressure gauge – Diaphragm
Reexamination Certificate

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Adaptive control method for rapid thermal processing of a...

Measuring and testing – Fluid pressure gauge – Diaphragm
Reexamination Certificate

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Apparatus and method for thermally processing substrates includi

Electric resistance heating devices – Heating devices – Radiant heater
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Apparatus for substrate temperature measurement using a...

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
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Backside rapid thermal processing of patterned wafers

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
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Profile ID: LFUS-PAI-P-1353443

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