4. Coating apparatus
  5. With indicating, testing, inspecting, or measuring means

Ravi Jallepally

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Advances in spike anneal processes for ultra shallow junctions

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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Apparatus and method for fast-cycle atomic layer deposition

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
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Apparatus for exposing a substrate to plasma radicals

Coating apparatus – Gas or vapor deposition – With treating means
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Chamber components with increased pyrometry visibility

Coating apparatus – With indicating – testing – inspecting – or measuring means
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Tailored temperature uniformity

Data processing: measuring – calibrating – or testing – Measurement system – Temperature measuring system
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Profile ID: LFUS-PAI-P-2227750

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