System for endpoint detection with polishing pad

Details System for endpoint detection with polishing pad System for endpoint detection with polishing pad

2006-10-09

2008-09-30

Shakeri, Hadi (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

With indicating

C451S041000, C451S285000

Reexamination Certificate

active

07429207

ABSTRACT:
A method of forming a polishing pad with a polishing layer having a polishing surface and a back surface. A plurality of grooves are formed on the polishing surface, and an indentation is formed in the back surface of the polishing layer. A region on the polishing surface corresponding to the indentation in the back surface is free of grooves or has shallower grooves.

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