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Manoocher Birang

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Adaptive endpoint detection for chemical mechanical polishing

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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Apparatus and method for detecting surface roughness in a chemic

Optics: measuring and testing – By polarized light examination – With light attenuation
Patent

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Apparatus and method for in-situ endpoint detection for...

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Apparatus and method for in-situ endpoint detection for...

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Apparatus and method for in-situ endpoint detection for...

Abrasive tool making process – material – or composition – Pore forming
Reexamination Certificate

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Profile ID: LFUS-PAI-P-85308

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