System and method for metal residue detection and mapping...

Details System and method for metal residue detection and mapping... System and method for metal residue detection and mapping...

2005-08-16

2005-08-16

Nguyen, Dung Van (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

With indicating

C451S005000

Reexamination Certificate

active

06929531

ABSTRACT:
A system and method of measuring a metallic layer on a substrate within a multi-step substrate process includes modifying a metallic layer on the substrate such as forming a metallic layer or removing at least a portion of the metallic layer. At least one sensor is positioned a predetermined distance from the surface of the substrate. The surface of the substrate is mapped to determine a uniformity of the metallic layer on the surface of the substrate.

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