Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2006-05-09
2006-05-09
Zarneke, David (Department: 2891)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S686000, C427S532000, C427S535000
Reexamination Certificate
active
07041596
ABSTRACT:
An excited surfactant species is created by generating plasma discharge in a surfactant precursor gas. A surfactant species typically includes at least one of iodine, led, thin, gallium, and indium. A surface of an integrated circuit substrate is exposed to the excited surfactant species to form a plasma-treated surface. A ruthenium thin film is deposited on the plasma-treated surface using a CVD technique.
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Blackburn Jason M.
Dalton Jeremie James
Drewery John Stephen
Gopinath Sanjay
Novellus Systems Inc.
Swenson Thomas
Yevsikov Victor V.
Zarneke David
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