4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Metal coating

Sanjay Gopinath

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Apparatus and methods for processing semiconductor...

Cleaning and liquid contact with solids – Apparatus – With heating – cooling or heat exchange means
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Apparatus for maintaining wafer back side and edge exclusion...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Atomic layer deposition for fabricating thin films

Stock material or miscellaneous articles – Structurally defined web or sheet – Discontinuous or differential coating – impregnation or bond
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Method and apparatus for introduction of solid precursors...

Semiconductor device manufacturing: process – Including control responsive to sensed condition
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Method for enhancing the nucleation and morphology of...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Profile ID: LFUS-PAI-P-2445408

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