4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

John Stephen Drewery

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Integrated circuit package

Active solid-state devices (e.g. – transistors – solid-state diode – Lead frame
Reexamination Certificate

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Method and apparatus for ionized physical vapor deposition

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Method and apparatus for ionized physical vapor deposition

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Method of fabricating an integrated circuit package...

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Making plural separate devices
Reexamination Certificate

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Methods for electroplating large copper interconnects

Etching a substrate: processes – Forming pattern using lift off technique
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Profile ID: LFUS-PAI-P-2060116

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