Photography – Fluid-treating apparatus – Fluid application to one side only of photographic medium
Patent
1995-06-29
1998-10-20
Rutledge, D.
Photography
Fluid-treating apparatus
Fluid application to one side only of photographic medium
396627, 414225, 414416, G03D 500
Patent
active
058261290
ABSTRACT:
This invention provides a substrate processing system including a cassette station on which at least one cassette containing a plurality of objects is placed, a process station including a plurality of process chambers for performing processing for the objects, and an object conveying unit for loading the objects into the process chambers and unloading the objects from the process chambers, a first object transfer unit for transferring the objects between the cassette station and the process station, and an interface section including an object waiting region where the objects wait, and a second object transfer unit for transferring the objects to the process station, wherein the process chambers in the process station are arranged around the object conveying unit, and the object conveying unit has a rotating shaft almost parallel to the vertical direction and can move up and down in the vertical direction along the rotating shaft and rotate about the rotating shaft.
REFERENCES:
patent: 4855775 (1989-08-01), Matsuoka
patent: 5442416 (1995-08-01), Tateyama et al.
patent: 5527617 (1996-06-01), Graiver et al.
patent: 5555234 (1996-09-01), Sugimoto
patent: 5651823 (1997-07-01), Parodi et al.
Akimoto Masami
Harada Kouji
Hasebe Keizo
Iida Naruaki
Kimura Yoshio
Rutledge D.
Tokyo Electron Kyushu Limited
Tokyo Electron Limited
LandOfFree
Substrate processing system does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Substrate processing system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate processing system will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-259091