Substrate processing system

Details Substrate processing system Substrate processing system

1995-06-29

1998-10-20

Rutledge, D.

Photography

Fluid-treating apparatus

Fluid application to one side only of photographic medium

396627, 414225, 414416, G03D 500

Patent

active

058261290

ABSTRACT:
This invention provides a substrate processing system including a cassette station on which at least one cassette containing a plurality of objects is placed, a process station including a plurality of process chambers for performing processing for the objects, and an object conveying unit for loading the objects into the process chambers and unloading the objects from the process chambers, a first object transfer unit for transferring the objects between the cassette station and the process station, and an interface section including an object waiting region where the objects wait, and a second object transfer unit for transferring the objects to the process station, wherein the process chambers in the process station are arranged around the object conveying unit, and the object conveying unit has a rotating shaft almost parallel to the vertical direction and can move up and down in the vertical direction along the rotating shaft and rotate about the rotating shaft.

REFERENCES:
patent: 4855775 (1989-08-01), Matsuoka
patent: 5442416 (1995-08-01), Tateyama et al.
patent: 5527617 (1996-06-01), Graiver et al.
patent: 5555234 (1996-09-01), Sugimoto
patent: 5651823 (1997-07-01), Parodi et al.

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