Structures and methods for measuring beam angle in an ion...

Details Structures and methods for measuring beam angle in an ion... Structures and methods for measuring beam angle in an ion...

2007-11-29

2010-06-01

Garber, Charles D (Department: 2812)

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

Reexamination Certificate

active

07728293

ABSTRACT:
The present invention involves an ion beam angular measurement apparatus for providing feedback for a predetermined set ion beam angle comprising an arrangement of composite pillars formed on an insulating material and wherein the composite pillars selectively allow ion beams to penetrate a first layer of a pillar, wherein resistivity measurements are taken for each of the composite pillars before and after test ion beam implantation and wherein the resistivity measurements yield information relating to an angle of the ion beam during test.

REFERENCES:
patent: 2002/0121889 (2002-09-01), Larsen et al.
patent: 2007/0120074 (2007-05-01), Rathmell et al.

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