4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Ivan Berry

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Chemical plasma cathode

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With plasma generation means remote from processing chamber
Reexamination Certificate

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Chemical plasma cathode

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With multiple gas energizing means associated with one...
Reexamination Certificate

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Dielectric barrier discharge apparatus and process for...

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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Method of photoresist ash residue removal

Semiconductor device manufacturing: process – Cleaning of wafer as interim step
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Method of stripping photoresist using re-coating material

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Removal of imaged layers
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Profile ID: LFUS-PAI-P-2082480

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