Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate
2006-05-30
2006-05-30
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
C250S306000, C250S307000, C250S492200, C250S492300
Reexamination Certificate
active
07053372
ABSTRACT:
A standard sample for transmission electron microscopy (TEM) elemental mapping and a TEM elemental mapping method using the same are provided. The standard sample includes a substrate; a first crystalline thin film containing heavy atoms formed on the substrate; a first amorphous thin film having oxides or nitrides containing light atoms and having a thickness of 1–5 nm or 6–10 nm formed on the first crystalline thin film; a second crystalline thin film containing heavy atoms formed on the first amorphous thin film. The standard sample can be used to correct TEM, EDS and EELS mapping results of a multi-layered nanometer-sized thin film and to optimize mapping conditions.
REFERENCES:
patent: 6231668 (2001-05-01), Loesch et al.
patent: 6420703 (2002-07-01), Wu et al.
Hirano Tatsumi
Kaji Kazutoshi
Park Gyeong-su
Park Jong-bong
Song Se-ahn
Buchanan & Ingersoll PC
Hitachi , Ltd.
Hitachi High-Technologies Co.
Samsung Electronics Co,. Ltd.
Wells Nikita
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